Birck Nanotechnology Center

Nanonex NX-2000

General Information

Equipment Name: Nanonex NX-2000 Airco

Coral Name: NANONEX_NX-2000

FIC: Minghao Qi and Alexandra Boltasseva

Process/Equipment Owner: Bill Rowe

Location: Cleanroom N-Bay

Max Wafer Size: 8


System Information

General Description:

The Nanonex NX-2000 is a nanoimprinting system that supports thermal imprinting or UV imprinting. It replicates the pattern of the mold onto your substrate in a polymer resist.
It allows multiple users and recipes to suit your process. The cycle time is very short with high throughput.



  • Molds and substrates from piece size up to 100mm
  • Pressures up to 550psi
  • Temperatures up to 250°C
  • Capable of resolutions <10nm
  • Capable of Thermal Imprinting
  • Capable of UV Imprinting
  • The NX-2000 can do both Thermal imprinting and Photo-curable imprinting
  • Can handle up to an 8 inch wafer
  • Will do patterning of less than 10nm
  • Quick cycle times-usually less than 2 minutes


Useful System Links

Equipment Use Fees
Reserve System
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.



For more information on the Nanonex NX-2000 Nanoimprinter you can go to