Birck Nanotechnology Center

Nanofabrication Cleanroom

BNC Labs - Nanofabrication Cleanroom

Below NIST A Vibration Levels

Temperature control

• 1.0 degree Celsius
• 0.1 degree in e-beam lithography bay

ISO Class 3 (Class 1)

• 6 bays


ISO Class 4 (Class 10)
• 5 bays


ISO Class 5 (Class 100)
• 2 bays

Capability to Upgrade Cleanliness

Capability for adding additional airflow
• Improving cleanroom cleanliness
• Adding cleanroom floorspace (reducing chase area)


Requires three components
• Area for additional air handlers
• Space for additional ductwork
• Modular ceiling system

 

 

 

cleanroom

Facilities