Nanofabrication Cleanroom
BNC Labs - Nanofabrication Cleanroom
Below NIST A Vibration Levels
Temperature control
• 1.0 degree Celsius
• 0.1 degree in e-beam lithography bay
ISO Class 3 (Class 1)
• 6 bays
ISO Class 4 (Class 10)
• 5 bays
ISO Class 5 (Class 100)
• 2 bays
Capability to Upgrade Cleanliness
Capability for adding additional airflow
• Improving cleanroom cleanliness
• Adding cleanroom floorspace (reducing chase area)
Requires three components
• Area for additional air handlers
• Space for additional ductwork
• Modular ceiling system
