Lesker E-Beam Evaporator
General Information
Equipment Name: Lesker E-Beam Evaporator
Coral Name:
FIC: Shared
Process/Equipment Owner:
Location: Cleanroom-Bay K
Max Wafer Size: 6
Superusers:
Josh Smith
Steve Hodson
Adam Neal
Ali Razavieh
System Information
General Description:
* Six Pocket E-Beam Evaporator
* Water-cooled, rotatable stage
* Used for Au, Ti, Ni, Cr, Pd, Al
* Quick pumpdown to 5x10-7 torr
* Handles up to 6" substrate
Capabilities:
* High Purity metal evaporator - Materials are limited to Au, Cr, Ti, Ni, Al, Pd
* Deposition rates range from .2-10 Angstroms/sec
* System Pressures of 5x10-8torr
* Primarily used for deposition of device quality Gold
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.