Birck Nanotechnology Center

Lesker E-Beam Evaporator

General Information

Equipment Name: Lesker E-Beam Evaporatorlesker

Coral Name:

FIC: Shared

Process/Equipment Owner:

Dave Lubelski

Location: Cleanroom-Bay K

Max Wafer Size: 6

Superusers:

Josh Smith

Steve Hodson

Adam Neal

Ali Razavieh

 

System Information

General Description:

* Six Pocket E-Beam Evaporator
* Water-cooled, rotatable stage
* Used for Au, Ti, Ni, Cr, Pd, Al
* Quick pumpdown to 5x10-7 torr
* Handles up to 6" substrate

Capabilities:

* High Purity metal evaporator - Materials are limited to Au, Cr, Ti, Ni, Al, Pd
* Deposition rates range from .2-10 Angstroms/sec
* System Pressures of 5x10-8torr
* Primarily used for deposition of device quality Gold

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
 

*Must install Coral and be a trained user to reserve a slot on this system.

Facilities