1217 Lakeshore Probestation
General Information
Equipment Name: 1217 Lakeshore Probestation
Coral Name:
FIC: Joerg Appenzeller
Process/Equipment Owner: Hong-Yan Chen
Location: BRK 1217
System Information
General Description:
- 6-arm full wafer probe station with movable sample stage
- sample stage can be biased with an external voltage source
- set up to be used with Agilent 4156C
System Capabilities:
- temperature up to 400K & down to 4.2K
- vacuum ~ e-5 torr
Comments:
- all users required to fill in the log book located beside the probe station.
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.
Documentation