1217 Lakeshore Probestation
Equipment Name: 1217 Lakeshore Probestation
FIC: Joerg Appenzeller
Process/Equipment Owner: Hong-Yan Chen
Location: BRK 1217
- 6-arm full wafer probe station with movable sample stage
- sample stage can be biased with an external voltage source
- set up to be used with Agilent 4156C
- temperature up to 400K & down to 4.2K
- vacuum ~ e-5 torr
- all users required to fill in the log book located beside the probe station.
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.