Birck Nanotechnology Center

1217 Lakeshore Probestation

General Information1

Equipment Name: 1217 Lakeshore Probestation

Coral Name:

FIC: Joerg Appenzeller

Process/Equipment Owner: Hong-Yan Chen

Location: BRK 1217

System Information

General Description:

- 6-arm full wafer probe station with movable sample stage
- sample stage can be biased with an external voltage source
- set up to be used with Agilent 4156C

System Capabilities:

- temperature up to 400K & down to 4.2K
- vacuum ~ e-5 torr


- all users required to fill in the log book located beside the probe station.

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.