Birck Nanotechnology Center

Heatpulse 610

General Information

Equipment Name: Heatpulse 610

Coral Name: rtp_600
**Note = this should be renamed RTP_610 in coral

FIC: Shared

Process/Equipment Owner: Dan Holser

Location: Cleanroom R Bay


System Information

General Description:

-Capable of simple time at temperature experiments.
-Able to set process anneal time.
-Able to set process anneal temperature (400 to 1000°C)
-Purge process gas is Nitrogen
-Not capable of long process runs at high temperatures.


-see above

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training  

*Must install Coral and be a trained user to reserve a slot on this system.