Equipment Name: Heatpulse 610
Coral Name: rtp_600
**Note = this should be renamed RTP_610 in coral
Process/Equipment Owner: Dan Holser
Location: Cleanroom R Bay
-Capable of simple time at temperature experiments.
-Able to set process anneal time.
-Able to set process anneal temperature (400 to 1000°C)
-Purge process gas is Nitrogen
-Not capable of long process runs at high temperatures.
Useful System Links