Equipment Listing
New rates effective June 2009. See specific equipment page for details.
AFM
Anodization
Atomic Layer Deposition
Biology
- Epindorf Centrifuge 5804
- Basi C-3 Cell Stand
- Invitrogen Countess Automated Cell Counter
- SANYO MCO-18M Multigas Incubator
Conventional Thermal Processing
Dry Etching
- Plasma RIE Etching Fundamentals and Applications (PDF)
- Branson Asher
- Panasonic E620 Etcher
- Plasma Tech RIE
- STS ASE DRIE
- STS AOE DRIE
- Xenon Difluoride Etch
E-beam Evaporation
- Airco E-beam Evaporator
- CHA E-beam Evaporator
- Leybold E-beam Evaporator
- Varian E-beam Evaporator
- PVD E-Beam Evaporator
- Lesker E-Beam Evaporator
E-beam Lithography
Electrodeposition
Hall Effect
Metalorganic CVD
Molecular Beam Epitaxy
Optical Photolithography
Photomask Generation
Plasma Enhanced CVD
Polishing & Planarization
Probe Stations
- Probe Station I
- Probe Station II
- Probe Station III
- Lakeshore Probestation
- Physiological Probe Station
- Signatone H-150 manual probe station
Rapid Thermal Processing
SEM
SPM
Sputtering Systems
STM
Surface Analysis
Surface Profilometry
TEM
Thermal Evaporation
Wafer Bonding
Wafer Cutting & Dicing
Wet Chemical Processing
Wire Bonding
XPS
XRD
Other/Not Listed
- Contact Annealer
- Critical point dryer (CPD)
- Desk-Top Precision Spin Coating System
- DynaPro99 Dynamic Light Scattering
- Hotplate Bonder
- JEOL/Nikon JCM-5000
- Laser lift-off and laser annealing
- Nanonex NX-2000
- Oxide PLD system
- Parylene CVD
- PL Cryostat
- Raith e_LiNE
- Thin Film Stress Machine
- Ultrapure Water System
- UV flood curing system
(requires login)