Birck Nanotechnology Center

Equipment Listing

New rates effective June 2009. See specific equipment page for details.

 

AFM

Anodization

Atomic Layer Deposition

Biology

Conventional Thermal Processing

Dry Etching

E-beam Evaporation

E-beam Lithography

Electrodeposition

Hall Effect

Metalorganic CVD

Molecular Beam Epitaxy

Optical Photolithography

Photomask Generation

Plasma Enhanced CVD

Polishing & Planarization

Probe Stations

Rapid Thermal Processing

SEM

SPM

Sputtering Systems

STM

Surface Analysis

Surface Profilometry

TEM

Thermal Evaporation

Wafer Bonding

Wafer Cutting & Dicing

Wet Chemical Processing

Wire Bonding

XPS

XRD

Other/Not Listed

 

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Facilities