Birck Nanotechnology Center

Key Capabilities

Nanoscale Metrology
Scanning Probe Microscopy (SPM)
Scanning Tunneling Microscopy (STM)
Atomic Force Microscopy (AFM)
Scanning Electron Microscopy (SEM)
Transmission Electron Microscopy (TEM)
In Situ TEM
X-Ray Diffraction (XRD)
X-Ray Photoemission Spectroscopy (XPS)
Auger Electron Spectroscopy (AES)
Electron Energy Loss Spectroscopy (EELS)
Ion Scattering Spectrometry (ISS)
Low Energy Electron Diffraction (LEED)
Focused Ion Beam Imaging (FIB)
Raman Spectroscopy
Photoluminescence
Near-Field Optical Microscopy (NSOM)

Materials Growth and Deposition
Molecular Beam Epitaxy (MBE)
Metal-Organic Chemical Vapor Deposition (MOCVD)
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
Halide Vapor-Phase Epitaxy (HVPE)
Pulsed Laser Deposition (PLD)
Atomic Layer Deposition (ALD)
Reactive magnetron sputtering
Electron Beam Evaporation
Thermal Evaporation
Sputter Deposition

Nanoelectronics and Microelectronics
Molecular Electronics
Nanowire Electronics
Carbon Nanotube Electronics
Silicon Microelectronics
Compound Semiconductor Devices
Wide Bandgap Semiconductor Devices
Thermoelectric Energy Conversion
Photovoltaic Energy Conversion

Nanofabrication
Optical Photolithography (resolution to ~ 2 µm)
Electron-Beam Lithography (resolution to ~ 10 nm)
Circuit-Layout Workstation
Optical Mask Generation
Reactive Ion Etching (RIE)
Inductively Coupled Plasma (ICP) etching
Focused Ion Beam Machining
Plasma Etching and Cleaning
Wet Chemical Processing
Thermal Oxidation and Diffusion
Rapid Thermal Processing (RTP)

Electronic Characterization
Current-Voltage Metrology (µV to 10 kV)
Capacitance-Voltage Metrology
Admittance-Voltage Metrology
Admittance-Frequency Metrology
Deep Level Transient Spectroscopy (DLTS)
Photoresponse Metrology
Hall Effect Metrology
Microwave Characterization (to over 200 GHz)
Variable Temperature Characterization (10 – 650 K)
Ultra-Low-Temperature Electrical Characterization (using liquid helium)

Nanophotonics
Laser-Based Microfluidic Diagnostics
Nanoscale Photonic Devices and Phenomena
Spectrophotometry
Interference Lithography

Bio-Nanotechnology and Nano-Chemistry
Devices for Cellular and Molecular Biology
Micro- and Nanoscale Biological Sensor Technology
Biological Micro-Electromechanical Systems (Bio-MEMS)
Fluorescence Microscopy
Chemical Synthesis
Electro-Synthesis
Nanoparticle Synthesis
Analytic Chemistry
Fourier-Transform Infrared Spectrometry (FTIR)

Theory and Computation
Computational Nanotechnology
Theory of Conduction in Nanoscale Systems
Computational Infrastructure Development

Facilities