Xenon Difluoride Etch
Equipment Name: Xenon Difluoride Etch
Coral Name: xef2
Process/Equipment Owner: John Coy
Location: Cleanroom S Bay
Max Wafer Size: 4
-Xactix Xenon Difluroide e1 etch system for MEMS applications
-Etch rates dependent on amount of exposed silicon
-Any silicon based sample up to 4 inches.
-Isotropic etch for silicon
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.