Birck Nanotechnology Center


General Information

Equipment Name: XRDXef2

Coral Name: xrd

FIC: Michael Capano

Process/Equipment Owner: John Coy

Location: brk1045

Max Wafer Size: 4


System Information

General Description:

-Panalytical MRD X'Pert Pro High Resolution XRD
-Primarily for high resolution single crystal diffraction


-12 arc second resolution
-small samples to 4 inch wafers

General Comments:

-Additional training required for access, contact John Coy for details.
-Intended for high resolution single crystal diffraction and thin film analysis.
-System can do: Rocking Curves, phi scans, Omega-Two Theta, Reflectivity, Reciprocal Maps and many more

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.