Kratos X-ray Photoelectron Spectrometer (XPS)
General Information
Equipment Name: Kratos X-ray Photoelectron Spectrometer (XPS)
Coral Name:
Staff Scientist in charge: Dmitry Zemlyanov
Location: Birck 1077
Max Wafer Size: 5 (10mm x 10mm preferred)
System Information
General Description:
X-ray Photoelectron Spectroscopy (XPS) provides information about the element and chemical composition of a substrate. The AXIS ULTRA DLD incorporates quantitative real-time parallel XPS imaging with a lateral resolution of 5 μm. The system integrates:
• The Kratos patented magnetic immersion lens
• A charge neutralization system
• Spherical mirror and concentric hemispherical analyzers combined with the newly developed delay-line detector (DLD)
• Fast load lock with cryo/heating options
• A catalytic cell to facilitate substrate treat and preparation (up to 7bar at 1000C)
• Monochromatic Al Kα (1486.6 eV) and Ag Lα (2984.3 eV) anodes
• Non-monochromatic dual anode X-ray gun with Al Kα (1486.6 eV) and Mg Kα (1253.6 eV)
• Stuttering ion gun (Ar, He)
• External ports for user-supplied facilities
• Glove box (in progress)
System Capabilities:
The technique can analyze any vacuum-compatible substrate.
Publications & Presentations
Useful System Links
Equipment Use Fees
Reserve System*
Schedule Training
$72 per hour (non-profit organizations); $150 per hour (profit organizations); $200 per hour (data analysis for profit organizations)
Comments/Suggestions
*Must install Coral and be a trained user to reserve a slot on this system.
Documentation
How to request XPS acquisition and analysis
CasaXPS Installation Instructions