Birck Nanotechnology Center

Kratos X-ray Photoelectron Spectrometer (XPS)

General Information

Equipment Name: Kratos X-ray Photoelectron Spectrometer (XPS)

Coral Name:


Staff Scientist in charge: Dmitry Zemlyanov

Location: Birck 1077

Max Wafer Size: 5 (10mm x 10mm preferred)



System Information

General Description:

X-ray Photoelectron Spectroscopy (XPS) provides information about the element and chemical composition of a substrate. The AXIS ULTRA DLD incorporates quantitative real-time parallel XPS imaging with a lateral resolution of 5 μm. The system integrates:

• The Kratos patented magnetic immersion lens
• A charge neutralization system
• Spherical mirror and concentric hemispherical analyzers combined with the newly developed delay-line detector (DLD)
• Fast load lock with cryo/heating options
• A catalytic cell to facilitate substrate treat and preparation (up to 7bar at 1000C)
• Monochromatic Al Kα (1486.6 eV) and Ag Lα (2984.3 eV) anodes
• Non-monochromatic dual anode X-ray gun with Al Kα (1486.6 eV) and Mg Kα (1253.6 eV)
• Stuttering ion gun (Ar, He)
• External ports for user-supplied facilities
• Glove box (in progress)

System Capabilities:

The technique can analyze any vacuum-compatible substrate.


Publications & Presentations


Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training $72 per hour (non-profit organizations); $150 per hour (profit organizations); $200 per hour (data analysis for profit organizations)


*Must install Coral and be a trained user to reserve a slot on this system.



How to request XPS acquisition and analysis

Become an Expert User

Complete XPS Service Contract

CasaXPS Installation Instructions