Birck Nanotechnology Center

Vistec VB6

General Information

Equipment Name: Vistec VB6leybold

Coral Name: VB6

FIC: Minghao Qi

Process/Equipment Owner: Bill Rowe

Location: Cleanroom Bay N

Max Wafer Size: 6


System Information

General Description:

* The Leica VB6 is a 100kV, Ultra-High Resolution, Widefield electron beam lithography tool.
* It is an excellent research tool for imaging IC designs, MEMS designs, and NanoCarbon/Nanotube work on the nanotech level.


* It can image small wafer samples up through 154.2mm wafers.
* It can image 5 inch and 6 inch photomasks.
* It can produce geometries down to 6nm in size.
* Field sizes up to 1.310mm for reduced stage movements
* Can write with a current of 200 pico amps up to 100 nano amps

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.



Vectorbeam Operator Manual pdf

Operators Manual pdf

Acceptance Test and Operator Jobfiles User Manual (VMS) pdf

Command Set Version pdf