Birck Nanotechnology Center

Dimension 3100 Scanning Probe Microscope (Veeco)

General Information

Equipment Name: Dimension 3100 Scanning Probe Microscope (Veeco)AFM

Coral Name: DI3100_brk1039

FIC: Ron Reifenberger

Process/Equipment Owner: Xin Xu

Location: BNC 1039

Max Wafer Size: 6


System Information

General Description:

The Dimension 3100 provides high resolution, three dimensional images.



  • X&Y Scan range: 90 µm square, lateral accuracy typically within 1%, max. 2%.
  • Z range: 6 µm
  • Electronic resolution: 16-bit on all axes for all scan sizes and offsets.

Useful System Links

Equipment Use Fees
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*Must install Coral and be a trained user to reserve a slot on this system.



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WSxM, a powerful and user-friendly Windows application for data processing in Scanning Probe Microscopy.