Birck Nanotechnology Center

Vecco Thermal Evaporator

General Information

Equipment Name: Vecco Thermal Evaporatorleybold

Coral Name: vecco_thermal_1

FIC: Minghao Qi

Process/Equipment Owner: Kenny Schwartz

Location: Cleanroom-Bay L

Max Wafer Size: 4


System Information

General Description:

-Thermal evaporates materials with a 4 electrodes

-Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers

-uses an Inficon deposition controller to monitor deposition thickness

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training  

*Must install Coral and be a trained user to reserve a slot on this system.



Operators Manual pdf