Vecco Thermal Evaporator
General Information
Equipment Name: Vecco Thermal Evaporator
Coral Name: vecco_thermal_1
FIC: Minghao Qi
Process/Equipment Owner: Kenny Schwartz
Location: Cleanroom-Bay L
Max Wafer Size: 4
System Information
General Description:
-Thermal evaporates materials with a 4 electrodes
-Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
-uses an Inficon deposition controller to monitor deposition thickness
Useful System Links
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*Must install Coral and be a trained user to reserve a slot on this system.
