Birck Nanotechnology Center

Varian E-beam Evaporator

General Information

Equipment Name: Varian E-beam Evaporatorleybold

Coral Name: varian

FIC: Minghao Qi

Process/Equipment Owner:

Kenny Schwartz

Dave Lubelski

Location: Cleanroom-Bay K

Max Wafer Size: 4


System Information

General Description:

-E-beam evaporates materials with a 4 pocket hearth

-Pockets hold 3.7 cc crucible liners

-Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers

-uses an Inficon deposition controller to monitor deposition thickness


-Materials: Au, Ti, Cr, Al, Ni, Cu, SiO2

Interactive Simulation:

Click here to launch the simulation.

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training  

*Must install Coral and be a trained user to reserve a slot on this system.



Operators Manual pdf