Varian E-beam Evaporator
Equipment Name: Varian E-beam Evaporator
Coral Name: varian
FIC: Minghao Qi
Location: Cleanroom-Bay K
Max Wafer Size: 4
-E-beam evaporates materials with a 4 pocket hearth
-Pockets hold 3.7 cc crucible liners
-Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers
-uses an Inficon deposition controller to monitor deposition thickness
-Materials: Au, Ti, Cr, Al, Ni, Cu, SiO2
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*Must install Coral and be a trained user to reserve a slot on this system.