Birck Nanotechnology Center

UV Flood Curing System

General Information

Equipment Name: UV flood curing systemAxitron

Coral Name: not listed

FIC: Tim Sands

Process/Equipment Owner: Jeremy Schroeder

Location: BRK 1217

 

System Information

General Description:

  • Basic UV flood curing system for UV sensitive polymers
  • Manufacturer: UV Process Supply, Inc.

System Capabilities:

  • intensity ~13mW/cm2 (~30mW/cm2 with new lamp)
  • 8”x8” cure area
  • 400W mercury lamp (replacement# 36970)
  • radiometer for measuring irradiance (see manual in documentation section)

General Comments:

  • No photoresist allowed in system

Useful System Links

Equipment Use Fees
Schedule Training
 
*Must install Coral and be a trained user to reserve a slot on this system.

  

Documentation

Manual

Spectrum for Mercury Lamp

VersaProbe Radio Meter

Facilities