Birck Nanotechnology Center

Titan 80-300 kV Environmental Electron Microscope

General Information2

Equipment Name: Titan 80-300 kV Environmental Electron Microscope

Coral Name: titan_80_300

FIC: Eric Stach

Process/Equipment Owner: Dmitri Zakharov

Location: BRK 1269

Superusers:

Seung Min Kim

Robert Colby

Max Wafer Size: pieces only

System Information

General Description:

High-resolution imaging with 1 Ångström information limit

Environmental Cell allows up to 20 Torr of gas pressure during in-situ observation at elevated temperatures

High-resolution STEM imaging with High-Angle Annular Dark-Field (HAADF) detector

3-D imaging through tomography

Chemical analysis & filtered imaging though Electron Energy Loss Spectroscopy (EELS)

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*Must install Coral and be a trained user to reserve a slot on this system.

 

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