Birck Nanotechnology Center

Stokes Ellipsometer

General Information

Equipment Name: Stokes Ellipsometercontact

Coral Name: none

FIC: Jong Hyun Choi and Steve Wereley

SIC: Lisa Reece

Process/Equipment Owner: Hartmut Hedderich

Location: BRK 2037

System Information

General Description:

The Stokes Ellipsometer can measure the thickness and optical properties, i.e. refractive index, of thin films.

Sample restrictions: flat substrate required.

System Capabilities:

Laser Systems: 543.5 and 632.8 Helium-Neon Gas Laser

Sample Size: up to 250 mm sample diameter

Film Thickness Range: 0-60,000 Angstroms on a substrate or 1,2,3 known sub layers


Training Registration for the BRK 2037 Ellipsometer can be found at:

Instrument sign-up and schedule can be found at: and, respectively.

Useful System Links

Equipment Use Fees
Reserve System*
*Must install Coral and be a trained user to reserve a slot on this system.



Ellipsometer Handbook