Stokes Ellipsometer
General Information
Equipment Name: Stokes Ellipsometer
Coral Name: none
FIC: Jong Hyun Choi and Steve Wereley
SIC: Lisa Reece
Process/Equipment Owner: Hartmut Hedderich
Location: BRK 2037
System Information
General Description:
The Stokes Ellipsometer can measure the thickness and optical properties, i.e. refractive index, of thin films.
Sample restrictions: flat substrate required.
System Capabilities:
Laser Systems: 543.5 and 632.8 Helium-Neon Gas Laser
Sample Size: up to 250 mm sample diameter
Film Thickness Range: 0-60,000 Angstroms on a substrate or 1,2,3 known sub layers
Comments:
Training Registration for the BRK 2037 Ellipsometer can be found at: http://plcn10.chem.purdue.edu/signupform_TRAINING_AR.html.
Instrument sign-up and schedule can be found at: http://plcn10.chem.purdue.edu/signupform_ELLIP.html and http://plcn10.chem.purdue.edu/schedule_ELLIP.html, respectively.
Useful System Links
Equipment Use FeesReserve System*
*Must install Coral and be a trained user to reserve a slot on this system.