Birck Nanotechnology Center

Hitachi S-4800 Field Emission SEM

General Information

Equipment Name: Hitachi S-4800 Field Emission SEM

Coral Name: s-4800

FIC: Eric Stach

Process/Equipment Owner: Dmitri Zakharov

Location: BRK 1235

Max Wafer Size: 4

2

System Information

General Description:

The S-4800 Cold Field Emission SEM combines the outstanding high resolution performance capabilities to offer superb resolution of ~ 2.0 nm at 30 kV.

System Capabilities:

Accelerating voltages are from 500 V to 30 kV

Resolution ~ 2.0 nm at 30 kV

A choice of specimen stage: 4", 2" and 1" wafer and cross section

Useful System Links

Equipment Use Fees
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*Must install Coral and be a trained user to reserve a slot on this system.

 

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