Hitachi S-4800 Field Emission SEM
General Information
Equipment Name: Hitachi S-4800 Field Emission SEM
Coral Name: s-4800
FIC: Eric Stach
Process/Equipment Owner: Dmitri Zakharov
Location: BRK 1235
Max Wafer Size: 4
System Information
General Description:
The S-4800 Cold Field Emission SEM combines the outstanding high resolution performance capabilities to offer superb resolution of ~ 2.0 nm at 30 kV.
System Capabilities:
Accelerating voltages are from 500 V to 30 kV
Resolution ~ 2.0 nm at 30 kV
A choice of specimen stage: 4", 2" and 1" wafer and cross section
Useful System Links
Equipment Use FeesReserve System*
Training Schedule Comments/Suggestions
*Must install Coral and be a trained user to reserve a slot on this system.