Equipment Name: Pyrogenic Oxidation
Coral Name: pyrogenic_oxidation
Process/Equipment Owner: Dan Hosler
Location: Cleanroom R Bay
Max Wafer Size: 3
A bank of 2 furnaces for pyrogenic oxidation processes.
Process gases include Hydrogen, Oxygen, Nitrogen, and Argon.
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.