Birck Nanotechnology Center

Pyrogenic Oxidation

General Information

Equipment Name: Pyrogenic Oxidation

Coral Name: pyrogenic_oxidation

FIC: Shared

Process/Equipment Owner: Dan Hosler

Location: Cleanroom R Bay

Max Wafer Size: 3


System Information

General Description:

A bank of 2 furnaces for pyrogenic oxidation processes.


Process gases include Hydrogen, Oxygen, Nitrogen, and Argon.

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.