Pyrogenic Oxidation
General Information
Equipment Name: Pyrogenic Oxidation
Coral Name: pyrogenic_oxidation
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom R Bay
Max Wafer Size: 3
System Information
General Description:
A bank of 2 furnaces for pyrogenic oxidation processes.
Capabilities:
Process gases include Hydrogen, Oxygen, Nitrogen, and Argon.
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.