Perkin Elmer 2400 Sputterer
General Information
Equipment Name: Perkin Elmer 2400 Sputterer
Coral Name: perkin_elmer_2400
FIC: David Janes
Process/Equipment Owner:
Location: Cleanroom-Bay S
Max Wafer Size: 8
System Information
General Description:
- 500 Watt RF power supply for mangnatron sputtering
- one 8" diameter table to load substrate
- chamber holds three 8" diameter targets
Capabilities:
- Targets installed are Ti, Al with 1% Si, and Au
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.
