Birck Nanotechnology Center

Perkin Elmer 2400 Sputterer

General Information

Equipment Name: Perkin Elmer 2400 Sputtererleybold

Coral Name: perkin_elmer_2400

FIC: David Janes

Process/Equipment Owner:

Dave Lubelski

Kenny Schwartz

Location: Cleanroom-Bay S

Max Wafer Size: 8


System Information

General Description:

- 500 Watt RF power supply for mangnatron sputtering

- one 8" diameter table to load substrate

- chamber holds three 8" diameter targets


- Targets installed are Ti, Al with 1% Si, and Au

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training  

*Must install Coral and be a trained user to reserve a slot on this system.



Operators Manual pdf