Birck Nanotechnology Center

Parylene CVD

General Informationaxic

Equipment Name: Parylene CVD

Coral Name: parylene_cvd_furnace

FIC: Babak Ziaie

Process/Equipment Owners:

Geoff Gardner
Bill Sheldon

Location: Cleanroom Bay D

Max Wafer Size: 8

System Information

General Description:

The Parylene deposition system model 2010 is a vacuum system used for the vapor deposition of the Parylene polymer type C and N onto a variety of substrates. The coating is truly conformal. The system consists of Vaporizer, Pyrolysis main furnace, Deposition chamber, Cold trap, and Vacuum pump.

There are three main steps in the process:

Parylene is vaporized from its solid dimer phase inside the vaporizer.
Pyrolysis furnaces:
It's a high temperature furnace (> 600C) which converts the dimer to monomer phase.
Polymerization happens at room temperature inside the chamber.

In summary, the system converts Parylene dimer to a gaseous monomer. Upon deposition the material polymerizes at room temperature onto the substrate. The coating thickness depends on the amount of dimer loaded in the vaporizer.


Base pressure is less than 10-20 mTorr.

Typical Process Settings:
Type C:
Vapor Heater Temp.: 175C
Pyrolysis Heater Temp.: 690C
Chamber Gauge Temp.: 135C
Pressure: Base pressure + 15 Vacuum Units (~35 mTorr)
Deposition Rate: 5um/hour

Type N:
Vapor Heater Temp.: 160C
Pyrolysis Heater Temp.: 650C
Chamber Gauge Temp.: 135C
Pressure: Base pressure + 55 Vacuum Units (~60-75 mTorr)
Deposition Rate: 0.75um/hour


Make sure the Liquid Nitrogen (Cold Trap) is running during the process!!! This prevents contamination of the vacuum pump by Parylene.

You must apply Microsoap solution to all surfaces that will be coated with Parylene such as main chamber and cold trap.

After deposition, you MUST clean the vaporizer tube, the chamber and the cold trap thimble.

Adhesion Promoter:
Silane A174 is used as adhesion promoter for Parylene polymer.

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.



Operators Manual pdf

Operating Instructions pdf

Coating Systems Guide pdf