Canon PLA-501F Wafer Aligner
Equipment Name: Canon PLA-501F Wafer Aligner
Coral Name: canon_pl501
FIC: David Janes
Process/Equipment Owner: Mike Courtney
Location: Cleanroom N Bay
Max Wafer Size: 4
General Description: The Canon PLA 501 F is a fully automatic production mask aligner designed for cassette-to-cassette operation. This tool is designed for the fabrication of whole 4" inch wafers only!
Comments: For exposures longer than 40 seconds: Set the exposure timer at 73.0 and press the start button. Set the desired time of exposure and press the EXPO button after alignment. After the first exposure is completed, reset the amount of exposure and press the EXPO button. Repeating these operations enables multiple exposures.
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.