OMVPE- Aixtron
General Information
Equipment Name: OMVPE- Aixtron
Coral Name: aixtron
FIC: Tim Sands
Process/Equipment Owner: John Coy
Location: BRK 2221
Max Wafer Size: 4
System Information
General Description:
- Organometallic vapor phase epitaxy (OMVPE) for gallium nitride based materials
- Low growth rates (~1m/hr)
- Manufacturer: Aixtron Inc. (200/4HT horizontal reactor)
System Capabilities:
- Organometallic sources
- aluminum (TMA)
- gallium(TMG)
- indium (Solution TMI)
- aluminum (TMA)
- Hydride gas
- ammonia
- ammonia
- Carrier gases
- nitrogen
- hydrogen
- nitrogen
- Dopants
- silicon (silane)
- magnesium (Cp2Mg)
- silicon (silane)
- Max temp
- 1200°C
General Comments:
- Training on this equipment is a long term commitment
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.