Replace: Birck Nanotechnology Center - Discovery Park at Purdue University

Birck Nanotechnology Center

OMVPE- Aixtron

General Information

Equipment Name: OMVPE- Aixtron

Coral Name: aixtron

FIC: Tim Sands

Process/Equipment Owner: John Coy

Location: BRK 2221

Max Wafer Size: 4

 

System Information

General Description:

  • Organometallic vapor phase epitaxy (OMVPE) for gallium nitride based materials
  • Low growth rates (~1m/hr)
  • Manufacturer: Aixtron Inc. (200/4HT horizontal reactor)

System Capabilities:

  • Organometallic sources
    • aluminum (TMA)
    • gallium(TMG)
    • indium (Solution TMI)
  • Hydride gas
    • ammonia
  • Carrier gases
    • nitrogen
    • hydrogen
  • Dopants
    • silicon (silane)
    • magnesium (Cp2Mg)
  • Max temp
    • 1200°C

General Comments:

  • Training on this equipment is a long term commitment

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
 
*Must install Coral and be a trained user to reserve a slot on this system.

  

Documentation

Manual