Nitric Oxide Anneal
General Information
Equipment Name: Nitric Oxide Anneal
Coral Name: nitric_oxide_anneal
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom P Bay
Max Wafer Size: 3
System Information
General Description:
A small furnace system for annealing samples in an Nitric Oxide environment.
Capabilities:
Process gases include Nitric Oxide, and Argon.
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.