Nitric Oxide Anneal
Equipment Name: Nitric Oxide Anneal
Coral Name: nitric_oxide_anneal
Process/Equipment Owner: Dan Hosler
Location: Cleanroom P Bay
Max Wafer Size: 3
A small furnace system for annealing samples in an Nitric Oxide environment.
Process gases include Nitric Oxide, and Argon.
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.