Birck Nanotechnology Center

Minipulse RTA

General Information

Equipment Name: Minipulse RTACHA

Coral Name: rtp_minipulse

FIC: Shared

Process/Equipment Owner: Dan Hosler

Location: Cleanroom R Bay

Max Wafer Size: 6


System Information

General Description:

-A small RTA capable of simple time at temperature processes.
-Contamination is not controlled in this system.
-Capable of temperatures of up to 1000°C
-Not capable of long process runs at high temperatures


Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.



Operating Instructions