Equipment Name: Minipulse RTA
Coral Name: rtp_minipulse
Process/Equipment Owner: Dan Hosler
Location: Cleanroom R Bay
Max Wafer Size: 6
-A small RTA capable of simple time at temperature processes.
-Contamination is not controlled in this system.
-Capable of temperatures of up to 1000°C
-Not capable of long process runs at high temperatures
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.