Birck Nanotechnology Center

Leybold E-beam Evaporator

General Information

Equipment Name: Leybold E-beam Evaporatorleybold

Coral Name: leybold

FIC: Minghao Qi

Process/Equipment Owner:

Dave Lubelski

Kenny Schwartz

Location: Cleanroom-Bay K

Max Wafer Size: 4


System Information

General Description:

-E-beam evaporates materials with a 4 pocket hearth

-Pockets hold 2.4 cc crucible liners

-Substrate fixture can hold one 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers

-uses an Inficon deposition controller to monitor deposition thickness


-Materials: Ti, SiO2, Al, Fe, Ag, Al2O3, Ni

- Limited use to Professor Shalaev, Professor Qi, and Professor Fisher's groups

Useful System Links

Equipment Use Fees
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.



Operators Manual pdf