Laser lift-off and laser annealing
General Information
Equipment Name: Laser lift-off and laser annealing
Coral Name: not listed
FIC: Tim Sands
Process/Equipment Owner: Jeremy Schroeder
Location: BRK 1217
System Information
General Description:
- homogenized 248nm pulsed excimer laser beam for a broad range of research
- laser lift-off studies of GaN on sapphire
- x-y stage for automated rastering of wafers
- laser annealing vacuum chamber for inert gas ambient
- laser manufacturer: Lamdba Physik (305i KrF excimer laser)
System Capabilities:
- homogenized laser beam
- 1000mJ/cm2 maximum fluence/energy density
- 10mm x 10mm beam size
- flat-top profile
- 1 to 50 Hz
- 28ns pulse
- 1000mJ/cm2 maximum fluence/energy density
- automated x-y stage (Newport)
- 150mm range
- 0.5m resolution
- 150mm range
- laser annealing vacuum chamber
- designed for rough vacuum (<5mTorr)
- various inert gas ambient possible
- large 6” quartz viewport
- holds wafers up to 4” diameter
- designed for rough vacuum (<5mTorr)
General Comments:
- Additional laser training required for access, contact John Coy for details
Useful System Links
Equipment Use FeesSchedule Training
*Must install Coral and be a trained user to reserve a slot on this system.