Birck Nanotechnology Center

Protemp Horizontal Furnaces

General Information

Equipment Name: Horizontal FurnaceCHA

Coral Paths:

Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_01_Clean_Ox
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_02_Nitride_Dep
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_03_LTO_Dep
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_04_Field_Ox
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_05_Anneal
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_06_Polysilicon
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_07_General_Ox
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_08_Phos_Dep
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_09_Phos_Drive

FIC: Shared

Process/Equipment Owner: Dan Hosler

Location: Cleanroom R Bay

System Information

General Description:

The Protemp Furnaces are multiple banks of multiple horizontal furnace tubes of varying process capabilities.

Capabilities:

Processes Capabilities:

Tube #1 - Wet / Dry Oxidation (Super-Clean users only)
Tube #2 - Polysilicon / Nitride Deposition
Tube #3 - Low Temperature Oxide Deposition

Tube #4 - Wet / Dry Oxidation (For general use)
Tube #5 - Post Metal Anneal
Tube #6 - Polysilicon Deposition

Tube #7 - Wet / Dry Oxidation (For general use)
Tube #8 - Phosphorous Deposition
Tube #9 - Phosphorous Drive-In


Process Temperatures:

Tube #1 - 1100°C maximum
Tube #2 - 800°C maximum
Tube #3 - 400°C maximum

Tube #4 - 1100°C maximum
Tube #5 - 1100°C maximum
Tube #6 - 650°C maximum

Tube #7 - 1100°C maximum
Tube #8 - 1100°C maximum
Tube #9 - 1100°C maximum


All nine furnace tubes are capable of samples up to 6 inches in diameter.

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.

 

Facilities