Protemp Horizontal Furnaces
General Information
Equipment Name: Horizontal Furnace
Coral Paths:
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_01_Clean_Ox
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_02_Nitride_Dep
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_03_LTO_Dep
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_04_Field_Ox
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_05_Anneal
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_06_Polysilicon
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_07_General_Ox
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_08_Phos_Dep
Birck Nanotechnology Center / Cleanroom / Thermal Oxidation / Protemp / Tube_09_Phos_Drive
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom R Bay
System Information
General Description:
The Protemp Furnaces are multiple banks of multiple horizontal furnace tubes of varying process capabilities.
Capabilities:
Processes Capabilities:
Tube #1 - Wet / Dry Oxidation (Super-Clean users only)
Tube #2 - Polysilicon / Nitride Deposition
Tube #3 - Low Temperature Oxide Deposition
Tube #4 - Wet / Dry Oxidation (For general use)
Tube #5 - Post Metal Anneal
Tube #6 - Polysilicon Deposition
Tube #7 - Wet / Dry Oxidation (For general use)
Tube #8 - Phosphorous Deposition
Tube #9 - Phosphorous Drive-In
Process Temperatures:
Tube #1 - 1100°C maximum
Tube #2 - 800°C maximum
Tube #3 - 400°C maximum
Tube #4 - 1100°C maximum
Tube #5 - 1100°C maximum
Tube #6 - 650°C maximum
Tube #7 - 1100°C maximum
Tube #8 - 1100°C maximum
Tube #9 - 1100°C maximum
All nine furnace tubes are capable of samples up to 6 inches in diameter.
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.