Equipment Name: GaN MBE
Coral Name: N/A
FIC: Michael Manfra
Location: BNC Lab 2277
The RIBER 2000 Molecular Beam Epitaxy (MBE) System is capable of growing on 2" substrates. This MBE features a Load Lock chamber, Reflective High Energy Electron Diffraction (RHEED) and automation software. Source materials include, N, Ga, In, Al, and Si for doping.
This tool has restricted use policies. However samples and structures can be considered for fabrication on an individual basis.
Useful System LinksEquipment Use Fees