Birck Nanotechnology Center

GaN MBE

mbe

General Information

Equipment Name: GaN MBE

Coral Name: N/A

FIC: Michael Manfra

Process/Equipment Owner:

Geoff Gardner

Location: BNC Lab 2277

Superusers:

System Information

mbe

General Description:

The RIBER 2000 Molecular Beam Epitaxy (MBE) System is capable of growing on 2" substrates. This MBE features a Load Lock chamber, Reflective High Energy Electron Diffraction (RHEED) and automation software. Source materials include, N, Ga, In, Al, and Si for doping.

Comments:

This tool has restricted use policies. However samples and structures can be considered for fabrication on an individual basis.

 

Useful System Links

Equipment Use Fees      

 

Facilities