GaN MBE
General Information
Equipment Name: GaN MBE
Coral Name: N/A
FIC: Michael Manfra
Process/Equipment Owner:
Location: BNC Lab 2277
Superusers:
System Information
General Description:
The RIBER 2000 Molecular Beam Epitaxy (MBE) System is capable of growing on 2" substrates. This MBE features a Load Lock chamber, Reflective High Energy Electron Diffraction (RHEED) and automation software. Source materials include, N, Ga, In, Al, and Si for doping.
Comments:
This tool has restricted use policies. However samples and structures can be considered for fabrication on an individual basis.
Useful System Links
Equipment Use Fees