Filmetrics
General Information
Equipment Name: Filmetrics
Coral Name: filmetrics
FIC: Shared
Process/Equipment Owners:
Location: Cleanroom Bay S
Max Wafer Size: 8
System Information
General Description:
The Filmetrics is used to measure the thickness and optical constants (n and k) of transparent and semi-transparent thin film such as oxides, nitrides, resists, polyimides, polysilicon. The Filmetrics measures film characteristics by reflecting light and then analyzing this light over a range of wavelengths.
Capabilities:
Measured films should be optically smooth. Very rough films and opaque films can not be measured.
Thickness Measurement Range:
150A and 50um
Optical Constant Measurement Range:
1000A and 10um
Thickness Accuracy:
+/- 1nm at 500nm
Wavelength Range:
400nm to 1000nm
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.
