Birck Nanotechnology Center

Filmetrics

General Informationfilmetrics

Equipment Name: Filmetrics

Coral Name: filmetrics

FIC: Shared

Process/Equipment Owners:

Geoff Gardner
Bill Sheldon

Location: Cleanroom Bay S

Max Wafer Size: 8

System Information

General Description:

The Filmetrics is used to measure the thickness and optical constants (n and k) of transparent and semi-transparent thin film such as oxides, nitrides, resists, polyimides, polysilicon. The Filmetrics measures film characteristics by reflecting light and then analyzing this light over a range of wavelengths.

Capabilities:

Measured films should be optically smooth. Very rough films and opaque films can not be measured.

Thickness Measurement Range:
150A and 50um

Optical Constant Measurement Range:
1000A and 10um

Thickness Accuracy:
+/- 1nm at 500nm

Wavelength Range:
400nm to 1000nm

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
 
*Must install Coral and be a trained user to reserve a slot on this system.

  

Documentation

Operators Manual pdf

Theory of Operation pdf

Operating Procedure pdf

Facilities