Birck Nanotechnology Center


General Information

Equipment Name: EpigressAxitron

Coral Name: epigress

FIC: Michael Capano

Process/Equipment Owner: John Coy

Location: brk2221

Max Wafer Size: 2


System Information

General Description:

-Metal Organic Chemical Vapor Deposition system for growing Silicon Carbide and Graphene.
-Capable of p and n type growth.

System Capabilities:

-Grows single crystal on pieces up to two inch wafers.
-No metals are allowed in this system.
-Growth temperatures from 1100 C to 1650 C

General Comments:

-Very limited access.

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.