Epigress
General Information
Equipment Name: Epigress
Coral Name: epigress
FIC: Michael Capano
Process/Equipment Owner: John Coy
Location: brk2221
Max Wafer Size: 2
System Information
General Description:
-Metal Organic Chemical Vapor Deposition system for growing Silicon Carbide and Graphene.
-Capable of p and n type growth.
System Capabilities:
-Grows single crystal on pieces up to two inch wafers.
-No metals are allowed in this system.
-Growth temperatures from 1100 C to 1650 C
General Comments:
-Very limited access.
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.