Equipment Name: Epigress
Coral Name: epigress
FIC: Michael Capano
Process/Equipment Owner: John Coy
Max Wafer Size: 2
-Metal Organic Chemical Vapor Deposition system for growing Silicon Carbide and Graphene.
-Capable of p and n type growth.
-Grows single crystal on pieces up to two inch wafers.
-No metals are allowed in this system.
-Growth temperatures from 1100 C to 1650 C
-Very limited access.
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.