Birck Nanotechnology Center

Electromask System

General Information

Equipment Name: Electromask Platemaker

Coral Name:

FIC: David Janes

Process/Equipment Owner: Michael Courtney

Location: Cleanroom M Bay

Electromask
EM

System Information

General Description: The Platemaker is a combination Step-and-Repeat camera and Pattern Generator capable of exposing either chrome or iron oxide photomasks up to 8" by 10" in size.

  • Jobs are now to be submitted through our online Queue

Comments: Our goal is to deliver your plates within 5 working days of job approval date (not submission date).
Jobs needed in less than two days are available only if time is permitting.
Five day delivery does not apply to staff vacations or university holidays. Please plan accordingly.
Data must meet the design requirements listed in: RULES
Please Do NOT send us email when a new job has been submitted. We receive notification from the queue.

Capabilities:

Direct Write
Light and Dark field masks with features 3 microns or larger, total design 0.25" smaller than glass size.
Step and Repeat
Light and Dark field masks with feature 1.25 microns and larger AND total die size less than 19,500x19,500 microns.
Transparencies
Convert transparencies to glass mask. Please contact staff for details and specifications.

Rates:

Equipment Rates

*Prices are subject to change without notice.

Please view CD specs for tolerance specifications.

We accept .gdsII, and .dxf, file formats. Note, for .dwg and .dxf submissions, you must approve the translation before we will flash any part of the job.

Useful System Links

Please see above information. Links are highlighed in blue.

 

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