Birck Nanotechnology Center

Contact Annealer

General Information

Equipment Name: Contact Annealercontact

Coral Name:

FIC: James Cooper

Process/Equipment Owner: Dave Lubelski

Location: Cleanroom-Bay P

Max Wafer Size: 5


System Information

General Description:

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.