Birck Nanotechnology Center

Cleanroom Ellipsometer

General Information

Equipment Name: Cleanroom EllipsometerCleanroom Ellipsometer

Coral Name: ellipsometer

FIC: Shared

Process/Equipment Owner: Dan Hosler

Location: Cleanroom R Bay

Max Wafer Size: 6

 

System Information

General Description:

The cleanroom ellipsometer can measure the thickness and refractive index of thin films and substrates.

Capabilities:

Laser System: Single laser of 6328Å wavelength Helium-Neon Gas Laser

Sample Size: Up to 6 inch wafer diameter

Film Thickness Range: 0-60,000 Angstroms

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training  

*Must install Coral and be a trained user to reserve a slot on this system.

  

Documentation

Operating Instructions

Facilities