Cleanroom Ellipsometer
General Information
Equipment Name: Cleanroom Ellipsometer
Coral Name: ellipsometer
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom R Bay
Max Wafer Size: 6
System Information
General Description:
The cleanroom ellipsometer can measure the thickness and refractive index of thin films and substrates.
Capabilities:
Laser System: Single laser of 6328Å wavelength Helium-Neon Gas Laser
Sample Size: Up to 6 inch wafer diameter
Film Thickness Range: 0-60,000 Angstroms
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.