Birck Nanotechnology Center

Carbon Nanotube PECVD

General Information

Equipment Name: Carbon Nanotube PECVDPECVD

Coral Name: nanotube_pecvd

FIC: Tim Fisher

Process/Equipment Owner: John Coy

Location: brk2283


System Information

General Description:

-Seki Techtron Diamond PECVD modified to grow carbon nanotubes.

General Comments:

-For access, contact Tim Fisher

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.