Carbon Nanotube PECVD
General Information
Equipment Name: Carbon Nanotube PECVD
Coral Name: nanotube_pecvd
FIC: Tim Fisher
Process/Equipment Owner: John Coy
Location: brk2283
System Information
General Description:
-Seki Techtron Diamond PECVD modified to grow carbon nanotubes.
General Comments:
-For access, contact Tim Fisher
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.