Birck Nanotechnology Center

Critical Point Dryer (CPD)

General Information

Equipment Name: Critical point dryer (CPD)Critical point dryer

Coral Name: CPD

FIC: Dimitrios Peroulis

Process/Equipment Owner: John Coy

Location: Cleanroom-Bay S

Max Wafer Size: 6


System Information

General Description: Wafer CPD MEMS Dryer

Capabilities: Ranges are from .25" to 6" wafer
**Do not use any acids in this machine

Useful System Links

Equipment Use Fees
Reserve System
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.



Operators Manual pdf