Critical Point Dryer (CPD)
General Information
Equipment Name: Critical point dryer (CPD)
Coral Name: CPD
FIC: Dimitrios Peroulis
Process/Equipment Owner: John Coy
Location: Cleanroom-Bay S
Max Wafer Size: 6
System Information
General Description: Wafer CPD MEMS Dryer
Capabilities: Ranges are from .25" to 6" wafer
**Do not use any acids in this machine
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.
