Birck Nanotechnology Center

CHA E-beam Evaporator

General Information

Equipment Name: CHA E-beam EvaporatorCHA

Coral Name: cha

FIC: Minghao Qi

Process/Equipment Owner:

Kenny Schwartz

Dave Lubelski

Location: Cleanroom-Bay K

Max Wafer Size: 4


System Information

General Description:

-E-beam evaporates materials with a 4 pocket hearth

-Pockets hold 8.2 cc crucible liners

-Substrate fixture can hold four 4" wafer with adapters for a 3" wafer, 2" wafer, and fragments of wafers

-uses an Inficon deposition controller to monitor deposition thickness


-Materials: Au, Ag, Pt, Pd, In, Si, Co, Nb, Fe, TiO2, Ge,Ti, Cr, Al, Ni, Cu, SiO2

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training  

*Must install Coral and be a trained user to reserve a slot on this system.



Operators Manual pdf