Birck Nanotechnology Center

Branson Asher

General Informationbranson

Equipment Name: Branson Asher

Coral Name: branson

FIC: Shared

Process/Equipment Owners:

Geoff Gardner
Bill Sheldon

Location: Cleanroom Bay K

Max Wafer Size: 6

System Information

General Description:This system is used to clean substrates or burn photoresist using Ar/O2 plasma.

Capabilities: The Branson Asher is a plasma system which uses Ar and O2 gases for cleaning or etching purpose. The system consists of a process chamber, main unit, RF generator, pressure gauge, and power supply.

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
 
*Must install Coral and be a trained user to reserve a slot on this system.

  

Documentation

Operators Manual pdf

Facilities