Equipment Name: Branson Asher
Coral Name: branson
Location: Cleanroom Bay K
Max Wafer Size: 6
General Description:This system is used to clean substrates or burn photoresist using Ar/O2 plasma.
Capabilities: The Branson Asher is a plasma system which uses Ar and O2 gases for cleaning or etching purpose. The system consists of a process chamber, main unit, RF generator, pressure gauge, and power supply.
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.