Birck Nanotechnology Center

Blue M Oven

General Information

Equipment Name: Blue M Oven

Coral Name: blue_m

FIC: Shared

Process/Equipment Owner: Dan Holser

Location: Cleanroom P Bay

Max Wafer Size: 2


System Information

General Description:

-A small tabletop furnace capable of oxidation and annealing
-Due to the large amount of experiments in this oven, contamination is not controlled.


-Three process gases - N2, Ar, and O2.
-Capable of temperatures up to 1100°C
-Samples lay horizontally on a quartz plate boat.
-The quartz tube is 3" in diameter.

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.



Operating Instructions

Gas Flows Document