Blue M Oven
Equipment Name: Blue M Oven
Coral Name: blue_m
Process/Equipment Owner: Dan Holser
Location: Cleanroom P Bay
Max Wafer Size: 2
-A small tabletop furnace capable of oxidation and annealing
-Due to the large amount of experiments in this oven, contamination is not controlled.
-Three process gases - N2, Ar, and O2.
-Capable of temperatures up to 1100°C
-Samples lay horizontally on a quartz plate boat.
-The quartz tube is 3" in diameter.
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.