Atomic Layer Deposition
General Information
Equipment Name: Atomic Layer Deposition
Coral Name: not listed
FIC: Peter Ye
Process/Equipment Owner: John Coy
Location: Cleanroom Bay G
Max Wafer Size: 2
System Information
General Description:
-Atomic Layer Deposition for growing crystals
-Al2O3, HfO2, ZrO2, and Ga2O3
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.