Birck Nanotechnology Center

Atomic Layer Deposition

General Information

Equipment Name: Atomic Layer DepositionAxitron

Coral Name: not listed

FIC: Peter Ye

Process/Equipment Owner: John Coy

Location: Cleanroom Bay G

Max Wafer Size: 2

 

System Information

General Description:

-Atomic Layer Deposition for growing crystals
-Al2O3, HfO2, ZrO2, and Ga2O3

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.

  

 

Facilities