Birck Nanotechnology Center

Anatech Sputterer

General Information

Equipment Name: Anatech SputtererAnatech

Coral Name: anatech_sputtering

FIC: David Janes

Process/Equipment Owner: Kenny Schwartz

Dave Lubelski

Location: Cleanroom-Bay S

Max Wafer Size: 2

 

System Information

General Description:

- MDX-500 DC power supply for mangnatron sputtering

- one 4" diameter table to load substrate

- chamber holds one 1.33" diameter targets

-base pressure is around 1 x 10^-5 Torr


Useful System Links

Equipment Use Fees
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*Must install Coral and be a trained user to reserve a slot on this system.

  

 

Facilities