Anatech Sputterer
General Information
Equipment Name: Anatech Sputterer
Coral Name: anatech_sputtering
FIC: David Janes
Process/Equipment Owner: Kenny Schwartz
Location: Cleanroom-Bay S
Max Wafer Size: 2
System Information
General Description:
- MDX-500 DC power supply for mangnatron sputtering
- one 4" diameter table to load substrate
- chamber holds one 1.33" diameter targets
-base pressure is around 1 x 10^-5 Torr
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.