Birck Nanotechnology Center

Ammonia Anneal

General Information

Equipment Name: Ammonia AnnealCHA

Coral Name: ammonia_anneal

FIC: Shared

Process/Equipment Owner: Dan Hosler

Location: Cleanroom P Bay

Max Wafer Size: 5


System Information

General Description:

-Capable of annealing samples and wafer
-No ammonia capability at this time due to safety hazards
-Only capable of Nitrogen processing at this time


-see above

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.