Ammonia Anneal
General Information
Equipment Name: Ammonia Anneal
Coral Name: ammonia_anneal
FIC: Shared
Process/Equipment Owner: Dan Hosler
Location: Cleanroom P Bay
Max Wafer Size: 5
System Information
General Description:
-Capable of annealing samples and wafer
-No ammonia capability at this time due to safety hazards
-Only capable of Nitrogen processing at this time
Capabilities:
-see above
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.