Equipment Name: Alpha-Step IQ
Coral Name: alphastep_2
Location: Cleanroom Bay L
Max Wafer Size: 8
General Description: The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.
Capabilities: Accommodates up to 150mm (6") substrate and 21mm (0.83") thick.
Measurement of vertical features ranging from 100A to approximately 2mm.
The horizontal resolution limited by the stylus radius.
Useful System LinksEquipment Use Fees
*Must install Coral and be a trained user to reserve a slot on this system.