Birck Nanotechnology Center

Alpha-Step IQ

General Informationaxic

Equipment Name: Alpha-Step IQ

Coral Name: alphastep_2

FIC: Shared

Process/Equipment Owners:

Geoff Gardner
Bill Sheldon

Location: Cleanroom Bay L

Max Wafer Size: 8


System Information

General Description: The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.

Capabilities: Accommodates up to 150mm (6") substrate and 21mm (0.83") thick.

Measurement of vertical features ranging from 100A to approximately 2mm.

The horizontal resolution limited by the stylus radius.

Useful System Links

Equipment Use Fees
Reserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.



Operators Manual pdf