Alpha-Step IQ
General Information
Equipment Name: Alpha-Step IQ
Coral Name: alphastep_2
FIC: Shared
Process/Equipment Owners:
Location: Cleanroom Bay L
Max Wafer Size: 8
System Information
General Description: The KLA-Tencor Alpha-Step IQ profiler measures step height, waviness and roughness of a surface.
Capabilities: Accommodates up to 150mm (6") substrate and 21mm (0.83") thick.
Measurement of vertical features ranging from 100A to approximately 2mm.
The horizontal resolution limited by the stylus radius.
Useful System Links
Equipment Use FeesReserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.
