Birck Nanotechnology Center

Airco E-beam Evaporator

General Information

Equipment Name: Airco E-beam EvaporatorAirco

Coral Name: airco

FIC: Minghao Qi

Process/Equipment Owner: Kenny Schwartz

Location: Cleanroom-Bay L

Max Wafer Size: 5


System Information

General Description:

-E-beam evaporates materials with a 4 pocket hearth

-Pockets hold 3.7 cc crucible liners

-Substrate fixture can hold four 4" wafers with rotation

-uses an Inficon deposition controller to monitor deposition thickness

-uses a load lock vacuum system.


-Materials: Au, Pt, Ti, Cr

Useful System Links

Equipment Use Fees
Reserve System
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.



Operators Manual pdf