Airco E-beam Evaporator
Equipment Name: Airco E-beam Evaporator
Coral Name: airco
FIC: Minghao Qi
Process/Equipment Owner: Kenny Schwartz
Location: Cleanroom-Bay L
Max Wafer Size: 5
-E-beam evaporates materials with a 4 pocket hearth
-Pockets hold 3.7 cc crucible liners
-Substrate fixture can hold four 4" wafers with rotation
-uses an Inficon deposition controller to monitor deposition thickness
-uses a load lock vacuum system.
-Materials: Au, Pt, Ti, Cr
Useful System Links
*Must install Coral and be a trained user to reserve a slot on this system.