Veeco Dimension AFM
General Information
Equipment Name: Veeco Dimension AFM
Coral Name: nanoman_afm
FIC: Shared
Process/Equipment Owner: John Coy
Location: Cleanroom J Bay
Max Wafer Size: 6
System Information
General Description:
--Veeco Dimension 3100 AFM
--Nanomanipulation
--Nanolithography
--Conductive AFM module
-Used to investigate sample surfaces.
Capabilities:
-Typical resolution 1-5nm
-Max x-y range 90 micron
-Max z range 5 micron
Acceptable materials are any dry sample. No fluids are allowed on this system.
Useful System Links
Equipment Use Fees
Reserve System*
Schedule Training
*Must install Coral and be a trained user to reserve a slot on this system.
