Birck Nanotechnology Center

Veeco Dimension AFM

General Information

Equipment Name: Veeco Dimension AFMAFM

Coral Name: nanoman_afm

FIC: Shared

Process/Equipment Owner: John Coy

Location: Cleanroom J Bay

Max Wafer Size: 6


System Information

General Description:

--Veeco Dimension 3100 AFM
--Conductive AFM module

-Used to investigate sample surfaces.


-Typical resolution 1-5nm
-Max x-y range 90 micron
-Max z range 5 micron

Acceptable materials are any dry sample. No fluids are allowed on this system.

Useful System Links

Equipment Use Fees
Reserve System
Schedule Training

*Must install Coral and be a trained user to reserve a slot on this system.



Operators Manual PDF