Birck Nanotechnlogy Scifres Cleanroom Internal Rates

Please use these as a baseline. The Birck staff is presently in the process of updating the rate sheets and some rates will necessarily change through that process.

SERVICE CHARGES:

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Cleanroom Daily Access Fee

$13k Annual & 8 Days Monthly

Per Day

$40.00

Training Time

$13k Annual

Per Hour

$47.00

Engineering Staff Time

$13k Annual

Per Hour

$53.00

Process Scientist Staff Time

$13k Annual

Per Hour

$75.00

EQUIPMENT: Metallization

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Airco E-Beam Evaporator

$13k Annual

Per 4 Hour Use

$100.00

Cha E-Beam Evaporator

$13k Annual

Per 4 Hour Use

$100.00

Leybold E-Beam Evaporator

$13k Annual

Per 4 Hour Use

$100.00

Perkin Elmer 2400 Sputterer

$13k Annual

Per 4 Hour Use

$100.00

Varian E-Beam Evaporator

$13k Annual

Per 4 Hour Use

$100.00

PVD Electron Beam Evaporator #1

$13k Annual

Per 2 Hour Use

$100.00

PVD Electron Beam Evaporator #2

$13k Annual

Per 4 Hour Use

$100.00

Veeco Thermal Evaporator

$13k Annual

Per 4 Hour Use

$100.00

Kurt J Lesker E-Beam

$13k Annual

Per 3 Hour Use

$100.00

PVD Sputtering System - Metals/Dielectrics

$13k Annual

Per 2 Hour Use

$60.00

PVD Sputtering System - Magnets

$13k Annual

Per 2 Hour Use

$60.00

Vistec E-Beam (VB6)

No

Per Hour

$147.00

EQUIPMENT: Testing

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Veeco Dimension AFM

$13k Annual

Per 1 Hour Use

$13.00

Dimension 3100 AFM

$13k Annual

Per 1 Hour Use

$30.00

Alpha-Step IQ

$13k Annual

Per Half-Hour Use

$4.00

Filmetrics

$13k Annual

Per Half-Hour Use

$3.00

Olympus BX-60 Microscope

$13k Annual

Per Half-Hour Use

$3.00

Ellipsometer

$13k Annual

Per Half-Hour Use

$6.00

JEOL JCM-5000 Table Top SEM

$13k Annual

Per Half-Hour Use

$15.00

MMR Probe Station #2

$13k Annual

Per 2 Hour Use

$51.00

EQUIPMENT: Furnaces

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Blue M Oven

$13k Annual

Per 1 Hour Use

$7.00

Ammonia (NH3) Anneal

$13k Annual

Per 1 Hour Use

$18.00

Nitric Oxide Anneal

$13k Annual

Per 1 Hour Use

$9.00

Silicon Carbide Anneal

$13k Annual

Per 1 Hour Use

$9.00

Pyrogenic Oxydation

$13k Annual

Per 4 Hour Use

$69.00

RTA Heatpulse 610

$13k Annual

Per 1 Hour Use

$10.00

RTA MiniPulse

$13k Annual

Per 1 Hour Use

$10.00

ProTemp Tube_01

$13k Annual

Per 1 Hour Use

$28.00

ProTemp Tube_02

$13k Annual

Per 1 Hour Use

$28.00

ProTemp Tube_03

$13k Annual

Per 1 Hour Use

$28.00

ProTemp Tube_04

$13k Annual

Per 1 Hour Use

$28.00

ProTemp Tube_05

$13k Annual

Per 1 Hour Use

$28.00

ProTemp Tube_06

$13k Annual

Per 1 Hour Use

$28.00

ProTemp Tube_07

$13k Annual

Per 1 Hour Use

$28.00

ProTemp Tube_08

$13k Annual

Per 1 Hour Use

$28.00

ProTemp Tube_09

$13k Annual

Per 1 Hour Use

$28.00

EQUIPMENT: Plasma (Etch)

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Branson

$13k Annual

Per 1 Hour Use

$10.00

Axic CVD

$13k Annual

Per 2 Hour Use

$42.00

Plasma Tech RIE

$13k Annual

Per Half-Hour Use

$16.00

ASE Etcher

$13k Annual

Per 1 Hour Use

$48.00

EQUIPMENT: Photolithography

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

MJB-1 Wafer Aligner

$13k Annual

Per Half-Hour Use

$12.00

MJB-2 Wafer Aligner

$13k Annual

Per Half-Hour Use

$12.00

Suss MA-6 Mask Aligner

$13k Annual

Per Half-Hour Use

$12.00

Spinner #1

$13k Annual

Per Half-Hour Use

$3.00

Spinner #2

$13k Annual

Per Half-Hour Use

$3.00

Nanonex NX-2000 Nanoimprinter

$13k Annual

Per 1 Hour Use

$21.00

Suss SB6e Substrate Bonder

$13k Annual

Per 1 Hour Use

$50.00

MA-24 Mask Aligner

$13k Annual

Per Half-Hour Use

$12.00

EQUIPMENT: Electrical Characterization

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

MMIIIProbe 3

$13k Annual

Per 2 Hour Use

$33.00

MMIIProbe 2

$13k Annual

Per 2 Hour Use

$33.00

MMIProbe 1

$13k Annual

Per 2 Hour Use

$33.00

Jandel 4-point probe system

$13k Annual

Per Half-Hour Use

$2.00

EQUIPMENT: Photomasks

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

PG

No

Per Mask

$273.00

IR

No

Per Mask

$210.00

RET

No

Per Mask

$58.00

Transparency

No

Per Mask

$21.00

EQUIPMENT: Miscellaneous

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Xef Etcher

$13k Annual

Per 1 Hour Use

$18.00

Parylene CVD

$13k Annual

Per 4 Hour Use

$48.00

FiJi200 ALD

$13k Annual

Per Use

$55.00

DiscoDad Dicing Saw

$13k Annual

Per 1 Hour Use

$23.00

Critical Point Driver (CPD)

$13k Annual

Per 1 Hour Use

$11.00

CMP

$13k Annual

Per 1 Hour Use

$18.00

Disco Dad Dicing Saw #2

$13k Annual

Per 1 Hour Use

$23.00

Easy Tube 3000 ALD

$13k Annual

Per 2 Hour Use

$40.00

Jipelec RTA

$13k Annual

Per 1 Hour Use

$15.00

Heidleburg

$13k Annual

Per 2 Hour Use

$138.00

Bruker Optical Profileometer

$13k Annual

Per Half-Hour Use

$15.00

EQUIPMENT: Bonders & STS

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

STS_AOE

$13k Annual

Per 1 Hour Use

$48.00

STS_ASE

$13k Annual

Per 1 Hour Use

$48.00

Panasonic

$13k Annual

Per Hour

$90.00

Stress Machine

$13k Annual

Per Half-Hour Use

$36.00

West Bond

$13k Annual

Per 1 Hour Use

$35.00

Wire Bonder #1 (KNS)

$13k Annual

Per 1 Hour Use

$16.00

Wire Bonder #2 (KNS)

$13k Annual

Per 1 Hour Use

$16.00

JFP Wire Bonder

$13k Annual

Per 1 Hour Use

$16.00

KNS4526 Ribbon Bonder

$13k Annual

Per 1 Hour Use

$16.00

Small Wire Bonding Package

$13k Annual

Per Package

$10.00

Large Wire Bonding Package

$13k Annual

Per Package

$25.00

METALS:

Scifres Nanotechnology Cleanroom Rate Schedule:

CAP?

Billable Unit

User Charge

Gold

No

Per Nanometer

$0.71

Platinum

No

Per Nanometer

$1.58

Palladium

No

Per Nanometer

$0.13

Scandium

No

Per Nanometer

$3.10

All Other Metals

No

Per Nanometer

$0.10

*$13k Annual cap refers to the $13,000 per user, per account CAP on a fiscal year basis

**8 Days Monthly cap refers to a max of 8 days paid per month in access fees per user, per account

LAB ACCESS (CHARGE BASED ON HIGHEST LEVEL ENTERED)

MACHINE/PROCESS

CAP?

UNIT

RATE

DRY LAB ACCESS CHARGE - LEVEL ONE

8 days Monthly

Per Day

$4.00

SOLVENT LAB ACCESS CHARGE - LEVEL TWO

8 days Monthly

Per Day

$13.00

ACID LAB ACCESS CHARGE - LEVEL THREE

8 days Monthly

Per Day

$19.00

*Cap is per user, per project per fiscal year

BIOLOGY LABS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

BioLabs Access

8 days Monthly

Per Day

$22.00

Zetasizer

No

Per Hour

$4.00

Olympus FV1000 Confocal Microscope

No

Per Hour

$25.00

Cell Culture BioHood Surcharge

No

Per Month

$25.00

Special Projects Hourly Staff Rate

No

Per Hour

$55.00

ELECTRON MICROSCOPY EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Hitachi S-4800 Field Emission SEM (s-4800)

No

Per Hour

$27.00

Titan 80-300 kV Environmental Electron Microscope (titan_80_300

No

Per Hour

$75.00

FEI Nova 200 NanoLab DualBeam TM-SEM/FIB (nova_200)

No

Per Hour

$54.00

SPI Sputter Coater (SPI_sputter_coater)

No

Per Run

$14.00

Electron Microscopy Staff Rate

No

Per Hour

$36.00

ATOMIC FORCE MICROSCOPY RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Nanotech AFM 1

$5k Annual

Per Hour

$25.00

Nanotech AFM 2

$5k Annual

Per Hour

$25.00

Agilent 5500

$5k Annual

Per Hour

$25.00

Asylum MFP3D Bio AFM

$10k Annual

Per Hour

$44.00

Asylum Cypher

$10k Annual

Per Hour

$44.00

*Cap is per user, per project per fiscal year

EPITAXY EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Electrodeposition

No

N/C

N/A

XRD (xrd) - normal scan

No

Per Hour

$45.00

XRD (xrd) - rsm scan

No

Per Run

$270.00

OMVPE Aixtron (aixtron)

No

Per Run

$175.00

Nitride Sputter System (nitride_sputtering)

No

Per Run

$85.00

Oxide PLD System (pld)

No

Per Run

$85.00

Epitaxy Staff Rate

No

Per Hour

$53.00

OPTICS AND SPECTROSCOPY EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Spectrophotometer Lambda

No

Per Hour

$17.00

Micro-sample Spectrometer

No

Per Hour

$17.00

Raman Spectrometer T64000

No

Per Hour

$27.00

NSOM_Renishaw

No

Per Hour

$19.00

V-VASE Spectroscopic Ellipsometer

No

Per Hour

$8.00

Optics Staff Rate

No

Per Hour

$66.00

RAITH E-BEAM EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Raith E-Line E-beam (raith)

No

Per Hour

$34.00

Raith E-Beam Staff Rate

No

Per Hour

$44.00

MPCVD EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

MPCVD (MPCVD)

No

Per Use

$51.00

MPCVD Staff Rate

No

Per Hour

$53.00

SURFACE ANALYSIS AND SPM EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Kratos XPS Analysis Time (xps - staff)

No

Per Hour

$70.00

Kratos XPS Instrument Time (xps)

No

Per Hour

$43.00

Glovebox

No

Per Hour

$25.00

Omicron (omicron)

No

Per Run

$50.00

LASER DOPPLER VIBROMETRY EQUIPMENT/PROCESS RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Micro System Analyzer (polytec_laser_vibrometer)

$2k Annual

Per Hour

$6.00

Vaccum Chamber (Suss_PLV50_ProbeStation)

$2k Annual

Per Hour

$13.00

LDV Staff Rate

No

Per Hour

$36.00

*Cap is per user, per project per fiscal year

FEMTOSECOND LASER & RAMAN SPECTROSCOPY RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Femtosecond Laser

No

Per Hour

$30.00

Raman Spectrometer

No

Per Hour

$27.00

Training/Staff Time

No

Per Hour

$37.00

THERMOELECTRIC CHARACTERIZATION RATE LISTING

MACHINE/PROCESS

CAP?

UNIT

RATE

Z-Meter (z_meter)

No

Per Hour

$10.00

Bulk (TE_bulk)

No

Per Hour

$10.00

Thin Film (TE_ThinFilm)

No

Per Hour

$10.00

Training/Staff Time

No

Per Hour

$31.00

Rates current as of July 1, 2013

For more information or questions, please contact:

  • Natosha Whisler
  • Recharge Center
  • Birck Nanotechnology Center
  • Phone: (765) 494-1539
  • Email: Nwhisle@purdue.edu

Purdue University, 610 Purdue Mall, West Lafayette, IN 47907, (765) 494-4600

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