Minipulse RTA

Return to Equipment at Birck Nanotechnology Center

Minipulse RTA

General Information

iLab Name: RTP Minipulse

iLab Core: BRK Furnace Core

FIC: Shared

Owner: Dan Hosler

Location: Cleanroom R Bay

Max Wafer Size: 6 inch (150 mm)

System Information

General Description

The Minipulse RTA is a small, benchtop rapid thermal processing machine used for a wide range of experiments, thus, contamination and cleanliness is not controlled.

Capabilities

Materials Compatibility

Not Applicable

Notes

Please note: Not capable of long process runs at high temperatures