Heatpulse 610

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Heatpulse 610 Heatpulse 610

General Information

FIC: Shared

Owner: Dan Holser

Location: Cleanroom R Bay

Max Wafer Size: 4 inch (100 mm)

System Information

General Description

The Heatpulse 610 RTA is a small, benchtop rapid thermal processing machine used for a wide range of experiments, thus, contamination and cleanliness is not controlled.

Capabilities

Materials Compatibility

Not Applicable

Notes

Please note: Not capable of long process runs at high temperatures