Nitric Oxide Anneal

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Nitric Oxide Anneal

General Information

iLab Name: Nitric Oxide Anneal

iLab Core: BRK Furnace Core

FIC: Shared

Owner: Dan Hosler

Location: Cleanroom P Bay

Max Wafer Size: 3 inch (75 mm)

System Information

General Description

Small bore, high temperature furnace for annealing silicon carbide.

Capabilities

Materials Compatibility

Not Applicable

Notes

Due to cleanliness and contamination concerns, this furnace tube is limited use