Nanonex NX-2000

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Nanonex NX-2000

General Information

iLab Name: Nanonex NX-2000

iLab Core: BRK Lithography Core

FIC: Minghao Qi and Alexandra Boltasseva

Owner: Bill Rowe

Location: Cleanroom N-Bay

Max Wafer Size: 8

System Information

General Description

The Nanonex is a nano-imprint lithography tool for making multiple copies of small geometry patterns.

Capabilities

Molds and substrates from piece size up to 100mm

Materials Compatibility

Not Applicable